Journal

[7] Effect of thermal annealing on sputtered a-Si film

Author

Do Young Kim, Hans S. Cho, Kyung Bae Park, Jang Yeon Kwon, Takashi Noguchi and Ji Sim Jung

Journal

Journal of The Korean Physical Society
J. Korean Phy. Soc.

Vol / Page / Year

45 / S847 / 2004

[6] SiO2 film formed by inductivity coupled plasma chemical vapor deposition at low temperature for poly-Si TFT

Author

Ji Sim Jung, Jang Yeon Kwon, Youngsoo Park, Do Young Kim, Hans S. Cho, Kyung Bae Park, Wenxu Xianyu and Huaxiang Yin

Journal

Journal of The Korean Physical Society
J. Korean Phy. Soc.

Vol / Page / Year

45 / S861 / 2004